January 12, 2023
With the third transfer of the semiconductor industry, the continuous rapid development of the domestic semiconductor industry has greatly driven the demand for semiconductor equipment. At the same time, the transformation and upgrading of the original production line has accelerated, bringing significant application opportunities for domestic robot industry chain enterprises.
For the application of robots, the semiconductor industry is a typical industry with "high requirements, high standards, and high barriers". Robots are essential in the semiconductor manufacturing process, and as intelligent manufacturing's most fundamental on-site intelligent infrastructure equipment, the application scenarios of electric actuators in semiconductor manufacturing are constantly expanding.
RobustMotion focuses on motion control systems and intelligent electric actuators. It has a wide range of product lines that cover electric grippers, electric push rods, electric slide tables, rotary cylinders, and linear rotary actuators. This variety of products allows customers to select and assemble suitable options based on different working conditions.
RobustMotion's actuators, with their flexibility, precision, openness, and controllability, are well-suited for various processes in the semiconductor industry, including wafer manufacturing, packaging, testing, and more. These characteristics allow them to meet the application requirements of different processes in the industry effectively.
01 Flexibility
Regardless of wafer manufacturing or packaging and testing, equipment needs to adapt to the demands of multiple processes, fast pace, and low error rates. Based on highly integrated electromechanical design and powerful drive-control integration technology, RobustMotion actuators have rich preset functions and high production flexibility. Taking the electric gripper as an example, the same model of gripper has a wide range of output capabilities. Within a certain stroke range, it can adaptively grip various workpieces without the need for repeated debugging. This effectively enhances production flexibility and adaptability, ultimately improving production efficiency.
02 Openness
The open, compatible, and flexible motion control system of RobustMotion electric actuators allows them to be embedded in various types of equipment or freely assembled into multi-axis robots. They can also be combined with different types of robots to form composite robots that are compatible with additional systems such as vision and voice control. This enables stable collaboration and the ability to output data to interface with on-site logistics systems, centralized control systems, or cloud-based data platforms, meeting the requirements of more complex and highly integrated modern production demands.
For example, the electric gripper can be used in conjunction with AMRs, robotic arms, or composite robots for tasks such as gripping and transferring wafer cassettes, as well as automatic loading and unloading of wafer cassettes.
03 Controllable
RM software control system has a user-friendly interface and simple operation, allowing for quick setup of point-to-point motion. It also enables real-time or offline collection of force-position data, real-time monitoring of operation status, and digital management, making production more efficient and controllable.
04 Precision
In the semiconductor industry, the manufacturing process is complex and involves hundreds or even thousands of steps, requiring high precision from production equipment. As semiconductor technology continues to advance, existing equipment is gradually unable to meet the demand for higher precision. RobustMotion's exclusive SoftForce® precision force control technology provides the industry with a series of precision force control products and solutions that offer higher force control accuracy.
The RM precision force-controlled electric gripper, precision force-controlled electric actuator, precision force-controlled electric slide, and precision force-controlled direct drive actuator, among others, are active in various production processes with their advantages of high precision, flexibility, and intelligence. They are used in applications such as centering positioning of wafers, transfer of microchips, and high-frequency picking and placing of granules.
RobustMotion® precision force-controlled micro gripper is capable of holding delicate and fragile chips with precision.
The RobustMotion® precision force-controlled micro gripper is capable of securely holding ultra-thin and fragile optical fiber tubes with a diameter of 125μm.
Semiconductor technology continues to iterate, further driving the release of the demand for equipment upgrades, RobustMotion also spares no effort to commit to product updates and technological breakthroughs to meet the semiconductor high-demand, high-standard advanced process needs; at the same time, joint upstream and downstream enterprises in different fields, in the semiconductor industry, together with the construction of a flexible manufacturing ecosystem, and jointly help China's semiconductor industry to a higher level of automation, flexibility, intelligent direction to further leap forward. automation, flexibility and intelligence.
